Journal
JOURNAL OF APPLIED CRYSTALLOGRAPHY
Volume 44, Issue -, Pages 380-384Publisher
INT UNION CRYSTALLOGRAPHY
DOI: 10.1107/S0021889811003578
Keywords
grazing-incidence small-angle X-ray scattering; soft X-rays; microphase separation; copolymer films
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Funding
- JSPS [22651034]
- Grants-in-Aid for Scientific Research [22651034] Funding Source: KAKEN
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Two-dimensional grazing-incidence small-angle X-ray scattering (GISAXS) measurements of SEBS8 block copolymer films deposited on Si(001) substrates have been performed to demonstrate depth-sensitive GISAXS utilizing soft X-rays of 1.77 keV. Remarkable elongation of the Bragg spots in the q(z) direction, corresponding to microphase separation, was observed for an angle of incidence close to the critical angle. The elongation was explained in terms of the penetration depth, which limits the effective size in the direction perpendicular to the sample surface. Lattice distortion near the surface was confirmed.
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