Journal
NANOTECHNOLOGY
Volume 26, Issue 17, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/26/17/175502
Keywords
gas sensor; CuO nanowire; Pd nanoparticle
Funding
- Japan Society for the Promotion of Science
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We report on conductometric gas sensors based on single CuO nanowires and compare the carbon monoxide (CO) sensing properties of pristine as well as Pd nanoparticle decorated devices in humid atmosphere. Magnetron sputter inert gas aggregation combined with a quadrupole mass filter for cluster size selection was used for single-step Pd nanoparticle deposition in the soft landing regime. Uniformly dispersed, crystalline Pd nanoparticles with size-selected diameters around 5 nm were deposited on single CuO nanowire devices in a four point configuration. During gas sensing experiments in humid synthetic air, significantly enhanced CO response for CuO nanowires decorated with Pd nanoparticles was observed, which validates that magnetron sputter gas aggregation is very well suited for the realization of nanoparticle-functionalized sensors with improved performance.
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