Journal
NANOTECHNOLOGY
Volume 26, Issue 18, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/26/18/185302
Keywords
nanofabrication; lithography; single photon source; nano LED array
Funding
- German Ministry of Education and Research (BMBF) within the project EPHQUAM [16BL0904]
- German Ministry of Education and Research (BMBF) within the project QPENS [13N9898]
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We report on an alternative illumination concept for a future lithography based on single-photon emitters and important technological steps towards its implementation. Nano light-emitting diodes (LEDs) are chosen as the photon emitters. First, the development of their fabrication and their integration technology is presented, then their optical characteristics assessed. Last, size-controlled nano-LEDs, well positioned in an array, are electrically driven and utilized for illumination. Nanostructures are lithographically formed, demonstrating the feasibility of the approach. The potential of single-photon lithography to reach the ultimate scale limits in mass production is discussed.
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