Effects of post-annealing on Schottky contacts of Pt/ZnO films toward UV photodetector

The Schottky contact of Pt/ZnO was formed by depositing ZnO films oriented along c-axis by pulsed-laser deposition on Pt/Ti buffer layer supported by SiO2/Si substrate. Effects of the post-annealing on the crystallinity, uniformity and native defects of ZnO film as well as Schottky contacts of Pt/ZnO films were investigated. Results show that the annealing can improve the crystallinity of ZnO film, suppress the native defects, and enhance the performance of Pt/ZnO Schottky contacts dramatically. The best Schottky diode shows the largest barrier height of 0.8 eV with reverse leakage current of 1.5x10(-5) A/cm(2). The zero-biased photodetector based on the best Schottky diode possesses responsivity of 0.265A/W at 378 nm, fast photo-response component with rise time of 10 ns and fall time of 17 ns. This report demonstrates possibility of ZnO films/Pt hetero-junction with large area Schottky contact, and establishes the potential of this material for use in UV photodetector devices. Crown Copyright (C) 2011 Published by Elsevier B. V. All rights reserved.