Nano-Optomechanical Resonators in Microfluidics

Operation of nanomechanical devices in liquid has been challenging due to the strong viscous damping that greatly impedes the mechanical motion. Here we demonstrate an optomechanical microwheel resonator integrated in microfluidic system that supports low-loss optical resonances at near-visible wavelength with quality factor up to 1.5 million, which allows the observation of the thermal Brownian motion of the mechanical mode in both air and water environment with high signal-to-background ratio. A numerical model is developed to calculate the hydrodynamic effect on the device due to the surrounding water, which agrees well with the experimental results. With its very high resonance frequency (170 MHz) and small loaded mass (75 pg), the present device has an estimated mass sensitivity at the attogram level in water.