Journal
NANO LETTERS
Volume 15, Issue 8, Pages 5131-5136Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.5b01346
Keywords
Diamond; microcavity; nanophotonics; nanofabrication; microdisk
Categories
Funding
- NRC
- CFI
- iCORE/AITF
- NSERC
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Optical microcavities enhance light matter interactions and are essential for many experiments in solid state quantum optics, optomechanics, and nonlinear optics. Single crystal diamond microcavities are particularly sought after for applications involving diamond quantum emitters, such as nitrogen vacancy centers, and for experiments that benefit from diamond's excellent optical and mechanical properties. Light matter coupling rates in experiments involving microcavities typically scale with Q/V, where Q and V are the microcavity quality-factor and mode-volume, respectively. Here we demonstrate that microdisk whispering gallery mode cavities with high Q/V can be fabricated directly from bulk single crystal diamond. By using a quasi-isotropic oxygen plasma to etch along diamond crystal planes and undercut passivated diamond structures, we create monolithic diamond microdisks. Fiber taper based measurements show that these devices support TE- and TM-like optical modes with Q > 1.1 x 10(5) and V < 11(lambda/n)(3) at a wavelength of 1.5 mu m.
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