Journal
NANO LETTERS
Volume 16, Issue 1, Pages 362-366Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acs.nanolett.5b03942
Keywords
Copper plasmonics; plasmonic nanocircuitry; CMOS plasmonics; hybrid plasmonic waveguide; near-field optical microscopy
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Funding
- Russian Science Foundation [14-19-01788]
- Ministry of Education and Science of the Russian Federation [16.19.2014/K, CCU MIPT RFMEFI59414 X 0009]
- Russian Science Foundation [14-19-01788] Funding Source: Russian Science Foundation
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Surface plasmon polaritons can give a unique opportunity to manipulate light at a scale well below the diffraction limit reducing the size of optical components down to that of nanoelectronic circuits. At the same time, plasmonics is mostly based on noble metals, which are not compatible with micro electronics manufacturing technologies. This prevents plasmonic components from integration with both silicon photonics and silicon microelectronics. Here, we demonstrate ultralow-loss copper plasmonic waveguides fabricated in a simple complementary metal-oxide semiconductor (CMOS) compatible process, which can outperform gold plasmonic waveguides simultaneously providing long (>40 mu m) propagation length and deep subwavelength (similar to lambda(2)/50, where lambda is the free-space wavelength) mode confinement in the telecommunication spectral range. These results create the backbone for the development of a CMOS plasmonic platform and its integration in future electronic chips.
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