Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 52, Issue 3, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.7567/JJAP.52.03BD01
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Funding
- Basic Science Research Program through the National Research Foundation of Korea (NRF)
- Ministry of Education, Science and Technology [2012R1A1A2007685]
- National Research Foundation of Korea [2012R1A1A2007685] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Maskless random reactive ion etching (RIE) texturing employing a SF6/O-2/Cl-2 gas mixture was investigated in order to achieve higher efficiencies in multicrystalline silicon (mc-Si) solar cells. Triangular pyramid structures with an aspect ratio of 1 were formed and, when the RIE power increased, the average reflectance was reduced by about 1.46% per 10 W. This was due to the increased density of the surface features. The performances of all of the RIE-textured mc-Si solar cells were improved compared with that of the reference cell. Among them, the 110 W cell, which had a 0.6% higher efficiency than the reference cell, had the highest efficiency of 16.82%. An impedance analysis was carried out to determine series resistance (R-s), shunt resistance (R-sh), and junction capacitance (C-j). Interestingly, the cell with higher efficiencies and higher structure densities had higher linear reverse currents. (c) 2013 The Japan Society of Applied Physics
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