Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue 4, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1143/JJAP.51.045001
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Funding
- Korea Institute of Ceramic Engineering and Technology
- Korean Ministry of Knowledge and Economics
- Korea Evaluation Institute of Industrial Technology (KEIT) [10041161] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [과C6A2001] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We prepared fluorine-doped tin oxide (FTO) nanorod films and a conventional FTO thin film for the application of a semiconducting gas sensor by spray pyrolysis method. The lengths of FTO nanorods (FTON, 100 and 500 nm) were controlled by changing deposition times, and FTO thin film (FTOT) was also prepared as a reference. The gas sensitivity test shows FTON with long nanorods had higher sensitivity for both hydrogen and ethanol gases but slow response and recovery times, despite an advantage of the higher gas sensitivity. FTO nanorod film with short length about 100 nm showed relatively lower sensitivity, but fast gas response and recovery characteristics. The fast response and recovery for the analyte gases are attributed to the conductance of FTO nanorods, which is closely related to the diameter and length of nanorods. (C) 2012 The Japan Society of Applied Physics
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