☆ 4.3 Article

Purified Silicon Film Formation from Metallurgical-Grade Silicon by Hydrogen-Plasma-Induced Chemical Transport

JAPANESE JOURNAL OF APPLIED PHYSICS (2013)

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

Volume 50, Issue 8S1, Pages 08JD01

Publisher

Japan Society of Applied Physics

DOI: 10.7567/jjap.50.08jd01

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Categories

Physics, Applied

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