☆ 4.3 Article

Study on Change in UV Nanoimprint Pattern by Altering Shrinkage of UV Curable Resin

JAPANESE JOURNAL OF APPLIED PHYSICS (2013)

Journal

JAPANESE JOURNAL OF APPLIED PHYSICS

Volume 50, Issue 6S, Pages 06GK09

Publisher

Japan Society of Applied Physics

DOI: 10.7567/jjap.50.06gk09

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Categories

Physics, Applied

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