Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 47, Issue 10, Pages 7842-7844Publisher
JAPAN SOCIETY APPLIED PHYSICS
DOI: 10.1143/JJAP.47.7842
Keywords
white light emitting device; hydrogenated carbon nitride; spectrum
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The possibility for white light emitting devices using carbon nitride (CN(x)) thin films has been studied. Microwave electron cyclotron resonance (ECR)-plasma chemical vapor deposition (CVD) and RF-sputtering apparatuses have been used for the formation of CN(x) thin films. In both cases, CH(4) was used as the source or sub-source of carbon in order to investigate the effect of hydrogenated carbon nitride for luminescence. The cathodoluminescence (CL) measurement of the film grown by ECR-plasma CVD method showed three peaks of red, green, and blue (R/G/B). The photoluminescence (PL) measurement of the film grown by RF-sputtering also showed the red peak, which could not be observed in the film without hydrogen. Together with the X-ray photoelectron spectroscopy (XPS) analysis data, we concluded that the red peak originates from the level relating to H atom and blue peak from C-N bonds. [DOI: 10.1143/JJAP.47.7842]
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