Journal
INTERNATIONAL JOURNAL OF PLASTICITY
Volume 34, Issue -, Pages 1-11Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ijplas.2012.01.001
Keywords
Indentation; Strain gradient effect; Substrate effect; Film/substrate system; Hardness
Funding
- National Natural Science Foundation of China [11102176, 11172258, 11002122, 10828205]
- Natural Science Foundation of Hunan Province for innovation Group [09JJ7004]
- Key Special Program for Science and Technology of Hunan Province [2009FJ1002]
- Australian Research Council [DP0985450]
- Australian Research Council [DP0985450] Funding Source: Australian Research Council
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To examine effects of indentation size and substrate on the hardness determination of thin films, two typical types of hard film/soft substrate (Ni/Fe) and soft film/hard substrate (Al/Si and Al/glass) systems are investigated. A simple model is proposed to predict the intrinsic hardness of thin films, which allows a more accurate fitting to empirical data and the estimation of ultimate film hardness. The model can be used to interpret indentation data and extrapolate the indentation depth-hardness curve to an important region where indentation depth lies between 1% to 5 times of film thickness. The results are well consistent with the evolving trend of composite hardness obtained from experiments and numerical results by finite element analysis. Crown Copyright (C) 2012 Published by Elsevier Ltd. All rights reserved.
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