Journal
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE
Volume 61, Issue -, Pages 71-79Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.ijmachtools.2012.05.011
Keywords
AFM machining; Nanoscratching; Ductile mode cutting of brittle material; Brittle transition; Acoustic emission monitoring
Funding
- Basic Science Research Program through the National Research Foundation of Korea (NRF)
- Ministry of Education, Science and Technology [2011-0012171]
- National Research Foundation of Korea [2011-0012171] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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The goal of this research is to investigate/monitor the machining characteristics and mode transitions during AFM nanoscratching of a brittle material such as Si (100) using acoustic emission (AE). By utilizing a specially designed AFM/nano stage setup, nano experiments were performed for various AFM tip engaging depths. With the aid of AFM and FE-SEM images, not only the typical features of each mode, such as pile-ups, chip formations, and crack propagations, but major mode changes including elastic/plastic and ductile brittle/transitions are observed and analyzed. To estimate mode transition depths, such as the yielding depth, the cutting initiating depth and the crack starting depth, theoretical models are employed and compared with the experimental results. Regarding in-process AE monitoring, various AE parameters such as AE RMS. AE count rate and AE frequency contents are generated from the monitoring signals and utilized to detect the mode states and transitions. Our results, which shows reasonably close theoretical estimations and appropriate sensitivity in AE monitoring, indicate that the proposed scheme can be used to characterize machining states and to differentiate various mode transitions from plastic deformation to the brittle crack generations during nano-scale machining. (C) 2012 Elsevier Ltd. All rights reserved.
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