Journal
MICROELECTRONICS RELIABILITY
Volume 55, Issue 11, Pages 2188-2197Publisher
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.microrel.2015.08.013
Keywords
Polyimide (PI); Resistive random access memory (ReRAM); Thermal imidization
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In this study, a polyimide (PI) thin film was synthesized as a resistive layer for creating resistive random access memory (ReRAM). The switch between high- and low-resistance states is caused by the formation and dissociation of dipole direction and Schottky barrier. The impact of imidization on memory properties was evaluated in detail by clarifying the transmission mechanism, and reliability properties including retention and endurance were improved using thermal imidization. In addition, the proposed PI-based ReRAM demonstrated superior performance levels compared with those of electrochemical-metallization-based and valence-change-based ReRAMs, including higher R-ON/R-OFF ratio (>10(7)) and lower operation energy (<0.16 MV/cm). (C) 2015 Elsevier Ltd. All rights reserved.
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