4.4 Article Proceedings Paper

Effect of Al doping on the retention behavior of memories HfO2 resistive switching

Journal

MICROELECTRONIC ENGINEERING
Volume 147, Issue -, Pages 104-107

Publisher

ELSEVIER
DOI: 10.1016/j.mee.2015.04.043

Keywords

RRAM; Hafnium oxide; Aluminum; Doping; Retention

Funding

  1. Fondazione Cariplo (MORE Project) [2009-2711]

Ask authors/readers for more resources

The retention behavior of HfO2-based resistive switching memory cells (REAM) is characterized as a function of Al doping concentration, which was previously reported to be a viable method for the improvement of the switching uniformity. While the low resistance state (LRS) does not exhibit any major variation up to 10(6) s for all the tested devices, two retention loss mechanisms can be identified for the high resistance state (HRS). The main HRS trend follows a temperature-activated gradual decrease of the resistance, which also depends on the doping concentration. In addition, tail bits of the population distribution show a very fast retention loss process that strongly depends on the doping concentration. (C) 2015 Elsevier B.V. All rights reserved.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.4
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

No Data Available
No Data Available