Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 66, Issue 5-8, Pages 1135-1146Publisher
SPRINGER LONDON LTD
DOI: 10.1007/s00170-012-4395-6
Keywords
Joint maintenance and product scheduling; Condition-based maintenance; Markov decision process; Semiconductor manufacturing
Funding
- Industry/University Cooperative Research for Intelligent Maintenance Systems (NSF) [0639468]
- Semiconductor Research Corporation (SRC) [1222.003]
- Directorate For Engineering [0825789] Funding Source: National Science Foundation
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Deteriorated equipment has a significant impact on the product quality and maintenance policies. In this paper, we present a decision-making architecture to determine maintenance and product dispatching policies based on condition-monitoring information and the relationship between machine degradation and associated product quality. We use a Markov decision process for the long-term decision making and integer programming for the short-term decision making with a multi-product, multi-station system. We demonstrate the advantage of the proposed approach by comparing the proposed policy with traditional decision-making approaches. Furthermore, we illustrate the improvement of the proposed policy over the current usage-based maintenance policy with a semiconductor manufacturing process application.
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