Journal
INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY
Volume 47, Issue 1-4, Pages 161-180Publisher
SPRINGER LONDON LTD
DOI: 10.1007/s00170-009-2214-5
Keywords
Micro-manufacture; Nano-manufacture; Micro-EDM; Micro-milling; Laser machining; Focussed ion beam; Micro-injection moulding; Nano-imprint lithography; Electroforming; Hot embossing
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The increasing demand for micro-products and components can be met only partly by the lithography-based micro-electromechanical systems fabrication processes that originated from the silicon-based microelectronics revolution of the late twentieth century. In particular, such processes have limitations when applied to new micro-devices which require the use of a variety of materials and complex 3D microstructures with high aspect ratios. In this context, the paper presents technologies complementary to lithography-based processes for the manufacture of devices or components incorporating micro- and nano-scale features. More specifically, special attention is given to the main findings obtained over the last 5 years from the authors' research programme on a range of micro- and nano-manufacturing technologies, namely, micro-electrodischarge machining, laser ablation, micro-milling, focussed-ion beam machining, micro-injection moulding, nano-imprint lithography, hot embossing and electroforming.
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