Journal
MEASUREMENT
Volume 59, Issue -, Pages 248-257Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.measurement.2014.08.011
Keywords
ZnO nanostructure; Oxidized PS; RF-sputtering; VOC sensing application
Funding
- Postgraduate Research Grant Scheme (PRGS) of the Universiti Sains Malaysia [1001/PFIZIK/845006]
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ZnO nanostructures were grown on thermally oxidized porous silicon (PS) substrates by RF-magnetron sputtering for volatile organic compounds (VOCs) sensing applications. PS was fabricated by electrochemical anodization of n-type crystalline silicon in an ethanoic hydrofluoric acid solution to produce a PS surface. X-ray diffraction (XRD) analysis confirmed that the ZnO nanostructure highly preferred an (002) phase orientation. The sensitivities of the ZnO/oxidized PS sensor investigated for 22 ppm of acetone, ethanol, iso-propanol, and toluene vapor at the optimum operating temperature of 250 degrees C were 79.6%, 83.4%, 69.3%, and 69%, respectively. The ZnO/oxidized PS sensor can be detect VOC vapor up to 2 ppm. (C) 2014 Elsevier Ltd. All rights reserved.
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