4.7 Article

Actuated Micro-optical Submount Using a Dielectric Elastomer Actuator

Journal

IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 16, Issue 1, Pages 98-102

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMECH.2010.2089991

Keywords

Actuators; manufacturing automation; optical interconnections; packaging; position control

Funding

  1. German BMBF [FKZ 03X5511]

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Analysis of the operating characteristics of a dielectric elastomer actuator (DEA) submount for the high-precision positioning of optical components in one dimension is presented. Precise alignment of a single-mode fiber is demonstrated and variation of the sensitivity of the submount motion by changing the bias voltage is confirmed. A comparison of the performance of the DEA submount with a piezoelectric alignment stage is made, which demonstrates that DEAs could present a very attractive, low-cost alternative to currently used manual technologies in overcoming the hurdle of expensive packaging of single-mode optical components.

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