Laser-machined piezoelectric cantilevers for mechanical energy harvesting

In this study, we report results on a piezoelectric-material-based mechanical energy-harvesting device that was fabricated by combining laser machining with microelectronics packaging technology. It was found that the laser-machining process did not have significant effect on the electrical properties of piezoelectric material. The fabricated device was tested in the low-frequency regime of 50 to 1000 Hz at constant force of 8 g (where g = 9.8m/s(2)). The device was found to generate continuous power of 1.13 mu W at 870 Hz across a 288.5 k Omega load with a power density of 301.3 mu W/cm(3).