Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 41, Issue 1, Pages 119-125Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2012.2227459
Keywords
Atmospheric-pressure plasma; damage-free plasma; multigas plasma; polyimide (PI); surface treatment
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Funding
- Plasma Concept Tokyo, Inc.
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Atmospheric-pressure plasma jet sources have proven useful for surface treatments; however, conventional plasma and near-plasma sources have limitations in the number of different plasma gas species that they can handle. We previously developed a damage-free multigas plasma jet source that can generate stable atmospheric-pressure plasma using various gas species without thermal/electrical discharge damage. Herein, we investigate the fundamental characteristics of the generated plasma such as gas temperature (<57 degrees C) and emission properties. In addition, we evaluate the industrial potential of the jet source by using it with various gas species to induce surface hydrophilization in a polyimide film. The jet source proved useful, and carbon dioxide proved the most effective of the studied gas species for the purpose with the hydrophilized surface maintaining a contact angle of about 30 degrees for over 32 days after plasma irradiation.
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