4.3 Article

Plasma Expansion From a Radio Frequency Microdischarge

Journal

IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 39, Issue 11, Pages 2512-2513

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2011.2143434

Keywords

Aerospace engineering; plasma sources

Funding

  1. Grants-in-Aid for Scientific Research [22684031] Funding Source: KAKEN

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Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5 L/min, a pressure of 7 torr, and a power of 10 W. Interesting plume patterns can be generated, and an example of plasma striations within the plume is shown.

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