Journal
IEEE TRANSACTIONS ON PLASMA SCIENCE
Volume 36, Issue 4, Pages 1250-1251Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2008.926955
Keywords
chemiluminescence; microchannels; microchemical reactor; microplasmas
Categories
Funding
- U.S. Air Force Office of Scientific Research
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Microchemical reactors consisting of parallel linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 x 10 arrays of 400-mu m-diameter devices with 125-mu m-wide gas flow channels have been conducted in rare gas and Ar/CS2 (lows and excitation of the array with a sinusoidal voltage. Visible chemiluminescence (lambda similar to 505 nm) resulting from the (A) over tilde -> (X) over tilde transition of CS2+ and the deposition of a (C-S)(n) microstructured polymer have been observed in the Ar/CS2 now experiments.
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