4.5 Article

Ultra-Thin Silicon Nitride X-Ray Windows

Journal

IEEE TRANSACTIONS ON NUCLEAR SCIENCE
Volume 60, Issue 2, Pages 1311-1314

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TNS.2013.2243754

Keywords

Optical films; space technology; X-ray applications; X-ray detectors

Funding

  1. European Space Agency (ESA) [4000106070/12/NL/CO]

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We have demonstrated the fabrication of ultra-thin Si fine grid supported silicon nitride X-ray windows. These X-ray windows exhibit unequaled transmission of soft X-rays, high strength and excellent thermal stability. Measured soft X-ray transmission performance is significantly enhanced compared to typical polymer or beryllium based X-ray window structures. A double sided grid structure is used to demonstrate the scaling of the technology to larger areas.

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