Journal
IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume 13, Issue 3, Pages 458-463Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TNANO.2013.2279101
Keywords
Nanowires; nanogenerator; piezoelectrics; wearable electronics; zinc oxide
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A novel lift-off method to obtain ZnO nanowires embedded in flexible films for wearable electronics application has been fabricated in this study. Traditional peel-off method using polydimethylsiloxane (PDMS) polymer to transfer ZnO nanowires to flexible films, however, it remains some ZnO nanowires on the original substrate. The novel lift-off strategy will overcome the previous situation and is a candidate for wearable electronics application. For finger bending application, the maximum open-circuit voltage and closed-circuit current density can be obtained about 115 mV and 59 nA/cm(2), respectively. Moreover, the lift-off fabrication is a promising method for Si substrate recycling usage and for large area fabrication.
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