Journal
IEEE TRANSACTIONS ON NANOTECHNOLOGY
Volume 8, Issue 2, Pages 252-257Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TNANO.2008.2009534
Keywords
Carbon nanotube (CNT) pressure sensors; low-power vacuum sensors; microcavity pressure sensors; suspended tubes
Categories
Funding
- Defense Advanced Research Project Agency seedling fund (Task Order NMO#715839) [NAS7-03001]
- Jet Propulsion Laboratory (JPL) Lew Allen Award Fund
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Carbon-nanotube-based vacuum gauges have been developed and characterized, which primarily utilize the thermal conductivity principle. The vacuum gauges, comprising 5- to 10-mu m-long single-walled nanotubes contacted on either end with Au/Cr electrodes, have been shown to operate at low power (nanowatts to microwatts) and exhibit a wide dynamic range from 760 to 10(-6). torr. Pressure sensitivity was found to increase rapidly as the bias power was increased. In addition, by etching part of the thermal SiO2 beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward higher vacuums. Results are compared to a conventional thin-film meander resistor, which was fabricated and whose pressure response was also measured for comparative purposes.
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