Journal
MATERIALS LETTERS
Volume 148, Issue -, Pages 22-25Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.matlet.2015.02.016
Keywords
Polyimide; Nanocrystalline materials; High dielectric constant; Thin film
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Polyimide thin film has a low dielectric constant of 3.2. In this paper, we fabricated polyimide/ZrO2-nanocrystals hybrid thin films with a high dielectric constant of 6.1. The polyimide/ZrO2-nanocrystals hybrid thin films were formed by a spin-coating and a sintering process. The organic/inorganic hybrid thin films were characterized by X-ray powder diffraction, transmission electron microscopy, scanning electron microscopy, and LCR meter. Our experimental results confirmed that ZrO2 nanocrystals were well dispersed and embedded in the hybrid thin films. Compared with pristine polyimide thin film, the dielectric constant of polyimide/ZrO2-nanocrystal hybrid thin film significantly increased due to the incorporation of inorganic component. (C) 2015 Elsevier B.V. All rights reserved.
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