Journal
IEEE TRANSACTIONS ON MAGNETICS
Volume 45, Issue 10, Pages 4234-4237Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TMAG.2009.2024544
Keywords
Density; design tradeoffs; enhancement; high frequency; optimization
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This paper presents the design and measurement of optimized inductors-on-silicon (micro-inductors) for use in high frequency dc-dc conversion applications. These ultra-compact low profile (< 70 mu m) inductors range in area from 0.5-2.5 mm(2). The design process utilizes optimization software that finds the optimal physical dimensions, to maximize inductor efficiency, given certain technology constraints. Optimized micro-inductors achieve measured inductance densities of 66 nH/mm(2) for a 2.5 mm(2) area, 110 nH/mm(2) for 1.3 mm(2) device and 82 nH/mm(2) for a 0.5 mm(2) footprint area. Measured saturation currents range from 0.15-0.5 A for the optimized devices.
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