Journal
MATERIALS CHARACTERIZATION
Volume 100, Issue -, Pages 1-12Publisher
ELSEVIER SCIENCE INC
DOI: 10.1016/j.matchar.2014.10.023
Keywords
Femtosecond laser; Tomography; Ablation; Serial sectioning; Ultrafast laser chemistry
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Funding
- Office of Naval Research ONR-DURIP [N000141010783]
- FEI Corporation
- U.S. Air Force [FA9550-12-1-0445]
- ONR [N00014-12-1-0039, N00014-12-1-0075]
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Femtosecond laser ablation offers the unique ability to remove material at rates that are orders of magnitude faster than existing ion beam technologies with little or no associated damage. By combining ultrafast lasers with state-of-the-art electron microscopy equipment, we have developed a TriBeam system capable of targeted, in-situ tomography providing chemical, structural, and topographical information in three dimensions of near mm(3) sized volumes. The origins, development, physics, current uses, and future potential for the TriBeam system are described in this tutorial review. (C) 2014 Elsevier Inc. All rights reserved.
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