Journal
IEEE TRANSACTIONS ON INDUSTRY APPLICATIONS
Volume 50, Issue 1, Pages 45-50Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIA.2013.2271742
Keywords
Fluoropolymer films; graft polymerization; metal plating; microfabrication; nonthermal plasma (NTP); surface treatment
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Microfabrication by photolithography and nickel plating of fluoropolymer film, exposed to atmospheric-pressure nonthermal-plasma (NTP) graft polymerization, are investigated. Electroless nickel plating on the NTP-graft-polymerization-treated polytetrafluoroethylene (PTFE) film is successfully achieved. Highly adhesive nickel plating is obtained by reverse bend test. Furthermore, photolithographic patterns are formed on the plated PTFE film. This process is expected to be applied to flexible printed substrates and millimeter-wave antenna.
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