Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 59, Issue 12, Pages 4855-4862Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIE.2011.2173096
Keywords
Optical microelectromechanical system (MEMS); optical transducer; position-displacement sensor
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Funding
- European Regional Development Fund
- Province of Lower Austria
- Austrian Science Fund (FWF) [TRP 226] Funding Source: researchfish
- Austrian Science Fund (FWF) [TRP226] Funding Source: Austrian Science Fund (FWF)
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For vibration and displacement sensors, robustness is one of the key requirements. Optical measurement concepts are among the most promising possibilities to achieve it. The presented microoptoelectromechanical system sensor modulates a light flux by means of two congruently placed aperture gratings: one etched into a seismic mass and the other fixed to the sensor package. Commercially available LED and photodetector components at the top and bottom of the sandwich structure generate and detect this modulated light flux and allow for a cost-effective implementation. The prototype used for experimental verification is actuated by inertial forces and exhibits a high sensitivity of 0.85 mV/nm for displacements of the seismic mass and a corresponding noise level of about 14 pm/root Hz. This sensitivity and noise level can be further improved, paving the way for small, lightweight, robust, and high-precision displacement sensors for a large variety of applications.
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