Journal
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS
Volume 56, Issue 4, Pages 937-948Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TIE.2008.2006935
Keywords
Differential evolution (DE); microelectromechanical systems (MEMS); robust design; stochastic ranking (SR)
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Funding
- Otto Monsted Fund of Denmark
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This paper introduces an improved differential evolution (DE) algorithm for robust layout synthesis of microelectromechanical system components subject to inherent geometric uncertainties. A case study of the layout synthesis of a combdriven microresonator shows that the approach proposed in this paper can lead to design results that meet the target performance and are less sensitive to geometric uncertainties than the typical designs. It is also demonstrated that the algorithm proposed in this paper cannot only obtain better results than the standard DE algorithm but also outperform some other state-of-art algorithms in constrained optimization.
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