Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 65, Issue 11, Pages 4854-4860Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2018.2868697
Keywords
Densification; indium gallium tin oxide (IGTO); low temperature; mobility; sputtering; thin-film transistor (TFT)
Funding
- Samsung Display
- MKE/KEIT through the Industrial Strategic Technology Development Program [10079974]
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The effects of chamber pressure (P-C) on the structural and chemical properties of an indium gallium tin oxide (IGTO) channel layer were examined. Smoother and denser IGTO films were obtained with decreasing P-C, which were explained based on the enhanced kinetic energy of sputtered particles due to fewer collisions with the plasma atmosphere. The resulting IGTO thin-film transistor exhibited a high mobility of 35.0 cm(2)/Vs, subthreshold gate swing of 0.17 V/decade, threshold voltage (V-TH) of -0.45 V, and I-ON/OFF ratio >10(8), even at a low annealing temperature of 150 degrees C.
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