Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 65, Issue 9, Pages 3732-3738Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2018.2860634
Keywords
AlGaN/GaN; enhancement mode (E-mode); gallium nitride on silicon (GaN-on-Si); high electron mobility transistor (HEMT); heterostructure field-effect transistor (HFET); normally-OFF; p-GaN-gated; selective etching
Ask authors/readers for more resources
A process for an enhancement-mode p-GaN-gated heterostructure field-effect transistor with self-aligned structuring of the p-GaN is proposed. A gate-first process is employed, for which the gate metallization acts as contact and etch mask simultaneously. In the access region, the p-GaN is selectively removed in a dryetch process by a Cl-2/N-2/O-2 gas mixture. Due to self-aligned processing and precise etch depth control, devices achieve a high saturation current of 554 mA .mm(-1), a threshold voltage of 1.08 V, breakdown voltages up to 560 V, and dynamic R-ON, increase of 45% for 200-V stress bias.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available