Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 61, Issue 5, Pages 1470-1476Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2014.2313095
Keywords
FeGaB; high Q; integrated magnetic inductor; multilayer film; radio frequency (RF) application; solenoid
Funding
- SRC
- Center for Nanoscale Systems (CNS), Harvard University, Cambridge, MA, USA
- National Nanotechnology Infrastructure Network
- National Science Foundation [ECS-0335765]
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We report new high quality factor (Q) integrated GHz magnetic inductors based on solenoid structures with FeGaB/Al2O3 multilayer films, which show significantly enhanced inductance and quality factor at GHz frequencies over their air core counterparts. These inductors show an excellent high-frequency performance with a wide operation frequency range 0.5-2.5GHz, in which the inductance is flat and the peak quality factor can reach similar to 20. The inductance of the magnetic inductor shows >100% enhancement compared with that of the same size air core inductor. These novel GHz inductors with high inductance and Q enhancement show great promise for applications in radio frequency integrated circuits.
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