Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 60, Issue 8, Pages 2648-2655Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2013.2270359
Keywords
Coplanar waveguide (CPW); defected ground structure (DGS); RF microelectromechanical systems (MEMS); tunable band-stop filter
Funding
- Foundation of National Key Laboratory of Science and Technology on Micro/Nano Fabrication
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This paper presents a coplanar waveguide (CPW) tunable band-stop filter using hybrid resonator and employing RF microelectromechanical systems (MEMS) capacitors. The MEMS switches are used as varactors to tune the filter resonance frequency. Defected ground structures (DGSs) with MEMS switch is employed for filter unit to achieve miniaturization of filter structure. To accurately analyze the filter unit structure parameters, a hybrid resonance circuit is used as equivalent circuit and the relationship of MEMS switch and the transverse slot capacitance is analyzed. Hereby, a CPW tunable band-stop filter, cascaded periodically by DGS and MEMS switches, is fabricated on a glass substrate (epsilon(r) = 3.78, tan delta = 0.0012). The filter has a midband retune loss of 2.3-2.8 dB and a tuning range of 35% from 8.5 to 12.3 GHz with a maximum dc voltage of 44 V. Finally, we propose a solution to achieve constant bandwidth when center frequency changes.
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