Journal
IEEE TRANSACTIONS ON ELECTRON DEVICES
Volume 58, Issue 5, Pages 1397-1403Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2011.2110652
Keywords
Effective mass; high-kappa dielectric; InAsSb; interface states; nonparabolicity; quantum capacitance; split capacitance-voltage
Funding
- Semiconductor Research Corporation
- Defense Advanced Research Projects Agency
- National Science Foundation Materials Research Science and Engineering Centers [DMR 0820404]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [820404] Funding Source: National Science Foundation
- Div Of Electrical, Commun & Cyber Sys
- Directorate For Engineering [1028807] Funding Source: National Science Foundation
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Experimental gate capacitance (C-g) versus gate voltage data for InAs0.8Sb0.2 quantum-well MOSFET (QW-MOSFET) is analyzed using a physics-based analytical model to obtain the quantum capacitance (C-Q) and centroid capacitance (C-cent). The nonparabolic electronic band structure of the InAs0.8Sb0.2 QW is incorporated in the model. The effective mass extracted from Shubnikov-de Haas magnetotransport measurements is in excellent agreement with that extracted from capacitance measurements. Our analysis confirms that in the operational range of InAs0.8Sb0.2 QW-MOSFETs, quantization and nonparabolicity in the QW enhance C-Q and C-cent. Our quantitative model also provides an accurate estimate of the various contributing factors toward C-g scaling in future arsenide-antimonide MOSFETs.
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