Journal
IEEE TRANSACTIONS ON CONTROL SYSTEMS TECHNOLOGY
Volume 18, Issue 5, Pages 1172-1179Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TCST.2009.2033201
Keywords
Compliant XY nanopositioner; cross-coupling; H-infinity control; high-speed scans; raster scanning
Funding
- Australian Research Council Center of Excellence for Complex Dynamic Systems and Control
- University of Newcastle ECR
Ask authors/readers for more resources
A compliant XY nanopositioner is presented in this brief. The device is designed to have a very low cross-coupling between the X-and Y-axis. Despite this, during high-speed raster scans, the cross-coupling effect can not be ignored. In this brief, a H-infinity controller is designed and implemented to minimize the X-to-Y cross-coupling of the nanoscale positioning stage, particularly at its mechanical resonance frequencies. The controller is augmented with integral action to achieve accurate tracking, as well as sufficient damping. Raster scan results over an area of 10 mu m X 10 mu m with small positioning errors are demonstrated. High-speed accurate raster scans of up to 100 Hz, with nanoscale resolution are also illustrated.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available