Journal
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY
Volume 19, Issue 3, Pages 948-952Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TASC.2009.2019665
Keywords
High-Q resonator; loss tangent; low-loss superconducting capacitor; superconducting qubit; vacuum-gap capacitor; vacuum microelectronics
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Low-loss microwave components are used in many superconducting resonant circuits from multiplexed readouts of low-temperature detector arrays to quantum bits. Two-level system defects in amorphous dielectric materials cause excess energy loss. In an effort to improve capacitor components, we have used optical lithography and micromachining techniques to develop superconducting parallel-plate capacitors in which lossy dielectrics are replaced by vacuum gaps. Resonance measurements at 50 mK on lumped LC circuits that incorporate these vacuum-gap capacitors (VGCs) reveal loss tangents at low powers as low as 4 x 10(-5) significantly lower than with capacitors using amorphous dielectrics. VGCs are structurally robust, small, and easily scaled to capacitance values above 100 pF.
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