Journal
IEEE SENSORS JOURNAL
Volume 11, Issue 12, Pages 3202-3210Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2011.2158997
Keywords
Electrical nonlinearities; mechanical nonlinearities; microelectromechanical systems (MEMS); resonators
Funding
- Fondazione Cariplo
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In this paper, mechanical and electrical nonlinearities of MEMS resonators are discussed and their influence on the resonant sensing performance is analyzed. An L-shaped resonator is proposed in order to reduce the influence of the nonlinear mechanical term on the global response with respect to the more standard clamped-clamped (I-shaped) resonator. An extended linear behavior of the L-shaped resonator is analytically demonstrated and validated through experimental results. As a consequence, the proposed resonator can be driven to larger vibration amplitudes through higher actuation voltages, allowing better signal-to-noise ratio (SNR).
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