Journal
IEEE SENSORS JOURNAL
Volume 10, Issue 3, Pages 572-577Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2009.2038665
Keywords
Microelectromechanical system (MEMS); photoacoustic spectroscopy (PAS); quantum cascade laser (QCL); sensor
Funding
- U.S. Army Research Laboratory
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The development of a microelectromechanical systems-scale photoacoustic chemical sensor is described. Specifically, both a pulsed and a modulated continuous wave quantum cascade laser were used to determine detection limits for dimethyl methylphosphonate (DMMP), a standard nerve gas simulant. These sources were continuously tunable from 9.3 to 10 mu m. We report a minimum detection level of 20 parts-per-billion (ppb) and exceptional agreement between the measured photoacoustic vibrational spectrum and the IR spectrum of DMMP. The results support the continued development of a miniaturized photoacoustic sensor.
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