High-Power Distributed Feedback Lasers With Surface Gratings

We present the results for high-power broad-area distributed feedback lasers with surface gratings of 80th, 135th, and 270th Bragg orders. A maximum output power of 11 W for a laser with 80th order grating, emitting around 976 nm with a spectral width <1 nm has been achieved. Similar narrow linewidth operation occurs for devices with 135th Bragg order from 7- to 11-W output power. The technological approach to fabricating these devices based on stepper lithography and reactive ion etching is described.