Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 23, Issue 2, Pages 88-90Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2010.2091268
Keywords
Biosensors; microresonators; rare-earth doping
Funding
- MEST [R31-2008-000-10071-0, 20100029255]
- OPERA
- MKE [09ZC1110]
- Ministry of Education, Science & Technology (MoST), Republic of Korea [R31-2008-000-10071-0] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-mu m diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated.
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