Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 21, Issue 1-4, Pages 79-81Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2008.2008659
Keywords
Microoptoelectromechanical systems (MOEMS); microsensors; optical polymers; plastics; waveguides
Funding
- Deutsche Forschungsgemeinschaft in the framework of the Collaborative Research Center [SFB 578]
- Spanish Ministry of Education and Science [TEC2005-07996-C02-01]
- Spanish Ministry of Science and Education
- Ramon y Cajal
- CSIC
- European Social Fund
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The optical and structural properties of poly(dimethylsiloxane) (PDMS) are considered to define disposable cantilever-based micooptoelectromechanical systems (MOEMS) by ways of soft lithography and with a high degree of monolithic integration. The very low Yaung's modulus of this material relaxes the dimensions' requirements, being Chen possible to define thick PDMS structures with a sensitivity comparable to nanometer scale silicon counterparts. Experimental results using a light-emitting diode working at 670 nm have determined the resonant frequencies of the proposed MOEMS and are in agreement with the numerical simulations done. Finally, when a 2-mu L droplet of ethanol (1.58 mg) is dispensed on the cantilever, relative losses rise to 25 dB, returning to its initial value when the droplet evaporates.
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