Journal
IEEE MICRO
Volume 30, Issue 2, Pages 80-88Publisher
IEEE COMPUTER SOC
DOI: 10.1109/MM.2010.39
Keywords
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Recent advances in Microelectromechanical system (MEMS) manufacturing and circuit design techniques have propelled mems-based silicon oscillators into the mainstream of electronic components. this article discusses the reasons for this trend, which include size, reliability, mass manufacturability, and performance advantages in various digital applications, such as processors and parallel and serial interfaces.
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