A 0.65 THz Focal-Plane Array in a Quarter-Micron CMOS Process Technology

A focal-plane array (FPA) for room-temperature detection of 0.65-THz radiation has been fully integrated in a low-cost 0.25 mu m CMOS process technology. The circuit architecture is based on the principle of distributed resistive self-mixing and facilitates broadband direct detection well beyond the cutoff frequency of the technology. The 3 x 5 pixel array consists of differential on-chip patch antennas, NMOS direct detectors, and integrated 43-dB voltage amplifiers. At 0.65 THz the FPA achieves a responsivity (R-v) of 80 kV/W and a noise equivalent power (NEP) of 300 PW/root Hz. Active multi-pixel imaging of postal envelopes demonstrates the FPAs potential for future cost-effective terahertz imaging solutions.