Journal
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
Volume 19, Issue 2, Pages -Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2012.2209865
Keywords
CMOS technology; excimer laser annealing (ELA); integrated optics; optical modulators; photodetectors; polycrystalline silicon; silicon nitride (SiN); silicon photonics (SiP)
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Funding
- Defense Advanced Research Projects Agency [W911NF-11-1-0435]
- Intel Corporation
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We present the vision of back-end deposited silicon photonics (BDSP) and review works that have been done in this field. Individual aspects of BDSP platform including excimer-laser-annealed polycrystalline silicon, low-loss plasma-enhanced chemical vapor deposition silicon nitride waveguide, modulator, detector, electrical interface, back-end CMOS compatibility, and benefits of the platform are discussed in detail.
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