Journal
IEEE ELECTRON DEVICE LETTERS
Volume 35, Issue 5, Pages 554-556Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2014.2310120
Keywords
Al-doped ZrO2; amorphrous; high mobility; solution; thin film transistor (TFT)
Categories
Funding
- National Natural Science Foundation of China [61006005]
- Shanghai Science and Technology Commission [13520500200]
- Shanghai Visiting Oriental Scholar Program
Ask authors/readers for more resources
In this letter, we report a solution-processed hafnium indium zinc oxide (HIZO) thin-film transistors (TFTs) with an Al-doped ZrO2 (AZO) gate dielectric. The AZO thin films were identified as an amorphous phase up to the annealing temperature of 600 degrees C and had a smooth surface with root-mean-square roughness of <0.35 nm. The relative dielectric constant of AZO thin film annealed at 400 degrees C is 19.67. And HIZO TFTs with AZO gate oxide exhibited a high saturation field-effect mobility of 18.1 cm(2)/Vs, a small subthreshold swing of 0.4 V/decade, and a high ON/OFF ratio of 10(7), which can satisfy the backplate requirements for flat panel displays.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available