Journal
IEEE ELECTRON DEVICE LETTERS
Volume 32, Issue 10, Pages 1460-1462Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LED.2011.2162814
Keywords
Coplanar waveguide (CPW); RF microelectromechanical systems (MEMS); tunable bandpass filter
Categories
Funding
- Foundation of National Key Laboratory of Science and Technology on Micro/Nano Fabrication
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This letter presents an RF microelectromechanical systems (MEMS) tunable bandpass filter with a tuning range of 30%. An analytical process of designing a bandpass filter is also presented by using MEMS switch, series gap, and etched structure in coplanar waveguide (CPW). The designed structure of the MEMS switch and CPW is used to get a wide tuning range of the filter. The fabricated filter performances show an acceptable agreement between the measured results and the simulation results with a center frequency from 10 to 13.5 GHz.
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